EpiStride SiC CVD System
Introducing the EpiStride System for Silicon Carbide: A New Stride in SiC Epitaxy
- 型号
- EpiStride
- 产品类别
- SiC CVD System
- Wafer size
- up to 200 mm Available in single- or dual-chamber configurations Ensuring the Highest Epitax
- Application
- compound semiconductor market enables high-performance chemical vapor deposition of Silicon Carbide for both 6 and 8-inch