LSA 101 Laser Spike Anneal System
Installed at leading IDM’s and Foundries globally, Veeco’s LSA101 System is the preferred technology for high-volume manufacturing of advanced logic devices from the 40nm to 14n...
- 型号
- LSA 101
- 产品类别
- Laser Spike Anneal System
- Process node/application
- 40nm to 14nm nodes
- Application
- led at leading IDM’s and Foundries globally, Veeco’s LSA101 System is the preferred technology for high