Korvus Technology HEX UHV 超高真空 PVD 系统
HEX UHV 产品资料标题为 World's Most Modular UHV System，并说明其为 HEX 系列 PVD instruments 的最新发展。
- 型号
- HEX UHV
- 产品类别
- Ultra-high vacuum PVD system
- 真空能力
- 1 × 10^-10 mbar
- 平台
- HEX Series PVD instruments
Beneq Transmute™
brings ALD precision to high-volume production. Built on Beneq’s proprietary 3-step ALD approach – combining plasma pre-treatment, plasma-enhanced ALD, and t...
- 型号或系列
- Transmute™
- 产品类别
- High-volume semiconductor ALD platform
- 包含型号
- Beneq Transmute
- Wafer size
- 200 mm fabs
Beneq Prodigy™
Learn the technical specifications of the Beneq Prodigy™, such as dimensions, process types, processing temperature range, and substrate types.
- 型号或系列
- Prodigy™
- 产品类别
- Compound semiconductor ALD batch tool
- 尺寸
- 3500 x 2500 mm
- Max Batch Load
- 150 mm x 50 wafers, 100 mm x 75 wafers
EVG ® 610
Mask Alignment System。The is a compact and multi-purpose R&D system that can handle small substrate pieces and wafers up to 200 mm.
EVG ® 620 NT
Mask Alignment System (semi-automated / automated)。The provides state-of-the art mask alignment technology on a minimized footprint area up to 150 mm wafer s...
EVG ® 6200 NT
Mask Alignment System (semi-automated / automated)。The mask aligner is a versatile tool for optical double-side lithography and wafer sizes up to 200 mm.
LITHOSCALE ®
Maskless Exposure Lithography System。is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication app...
LITHOSCALE ® XT
High Throughput Maskless Exposure Lithography System。is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of micr...
EVG ® 101
Advanced Resist Processing System。The perfect solution for single-wafer resist processing in R&D and small-scale production
EVG ® 105
Stand-alone EVG®105 bake module for soft- or post-exposure bake processes
EVG ® 120
Automated Resist Processing System。The is a fully automated resist processing system designed for both low-volume and high-volume manufacturing, supporting w...
EVG ® 150
Automated Resist Processing System。The is a fully-automated resist processing system providing highthroughput performance and supporting wafers up to 200 mm ...
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