EVG ® 105
Stand-alone EVG®105 bake module for soft- or post-exposure bake processes
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EVG ® 120
Automated Resist Processing System。The is a fully automated resist processing system designed for both low-volume and high-volume manufacturing, supporting w...
EVG ® 150
Automated Resist Processing System。The is a fully-automated resist processing system providing highthroughput performance and supporting wafers up to 200 mm ...
HERCULES ®
Lithography Track System。The is a high-volume platform integrating the entire lithography process flow in one system, reducing process footprint and operator...
EVG ® 610
UV Nanoimprint Lithography System。Mask alignment system with UV Nanoimprint Lithography capability from small pieces up to 150 mm
EVG ® 620 NT
Smart NIL ® UV Nanoimprint Lithography System。Mask alignment system with UV Nanoimprint Lithography capability featuring EVG´s proprietary SmartNIL ® technol...
EVG ® 6200 NT
SmartNIL UV Nanoimprint Lithography System。Mask alignment system with UV Nanoimprint capability featuring EVG´s proprietary SmartNIL ® technology up to 150 mm
EVG ® 720
Automated SmartNIL ® UV Nanoimprint Lithography System。Full-field UV Nanoimprint Lithography system up to 150 mm utilizing flexible stamps, featuring EVG´s p...
EVG ® 7200
Automated SmartNIL ® UV Nanoimprint Lithography System。Full-field UV Nanoimprint Lithography system up to 200 mm utilizing flexible stamps, featuring EVG´s p...
EVG ® 7300
Multifunctional UV Nanoimprint Lithography System。Multifunctional UV Nanoimprint Lithography system up to 300mm featuring SmartNIL ® technology, lens molding...
EVG ® 7200 LA
Large-Area SmartNIL ® UV Nanoimprint Lithography System。UV Nanoimprint Lithography system for large area panels
HERCULES ® NIL
Fully Integrated SmartNIL ® UV-NIL Systems。fully integrated SmartNIL ® UV-NIL system up to 200 mm
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